Industry
Piping components for semiconductor fabs
A fab runs on its utilities. Ultrapure water, process cooling, bulk gases and exhaust all have to stay clean, tight and running around the clock.
- Product ranges
- 3
- Materials
- Stainless Steel
- Product standards
- ASME B16.9, ASME B16.11, ISO 2853 / 3-A SSI
The requirement
What semiconductor fabs demand of a fitting
Semiconductor fabrication depends on a large plant of support systems around the clean room: ultrapure water, process cooling water, bulk gas distribution, chemical delivery and exhaust. Most of the piping in a fab sits in these systems rather than inside the tools.
Cleanliness and leak-tightness drive the specification. Stainless steel is the default for product-wetted and high-purity service, joints are kept to a minimum, and small-bore lines are made with compression or orbital-welded connections that can be verified before handover.
The highest-purity gas and chemical lines are often specified to the tool maker's own requirements for surface finish and cleaning. State those requirements with the enquiry, and we will confirm what we can supply against them.
IllustrationWhere these components sit
- Ultrapure water generation and distribution loops
- Process cooling water headers and tool hook-ups
- Bulk gas distribution and instrument air
- Chemical delivery and drain lines
- Scrubber and exhaust ducting connections
Specification points that matter here
- State surface finish and cleaning requirements for high-purity service
- 316L stainless for product-wetted and ultrapure water lines
- Twin-ferrule tube fittings for small-bore gas and instrument lines
- Minimise joints and dead legs in ultrapure water loops
- Leak and pressure test requirements agreed before supply
Ranges for this sector
What we supply into it
The categories most often specified for this service. Every one carries the full range behind it.
- Instrument FittingsTwin-ferrule tube fittings and valves that grip the tube as the nut is tightened, for leak-tight instrument connections without welding or threading.View the range
- Hygienic FittingsStainless steel hygienic fittings with smooth, crevice-free bores and clamp or union joints, for food, dairy and pharma lines that are cleaned in place.View the range
- Buttweld FittingsButtweld elbows, bends, tees, reducers and caps welded end to end with the pipe, for a joint as strong as the pipe itself and a smooth, leak-free bore.View 14 products
Commonly specified products
The individual products this sector orders most often.
90° Elbow (LR & SR)Buttweld 90° elbows in long and short radius to ASME B16.9, in carbon, stainless and alloy steel, with dimension tables by material and class.View specifications
Equal TeeButtweld equal (straight) tees to ASME B16.9 for three pipes of one size, in carbon, stainless and alloy steel, with dimension tables by class.View specifications
Concentric ReducerButtweld concentric reducers to ASME B16.9 for an in-line size change on a common centreline, in carbon, stainless and alloy steel.View specifications
Forged UnionForged unions to MSS SP-83, socket weld and threaded, 1/8″ to 4″, for joints that must be broken for maintenance.View specifications
Standards that apply
Scope and key points for each are on the standards reference; dimensions and pressure classes are in the Technical Catalog.
Enquiries
Need components for Semiconductor Fabs?
Send the line list, the isometric or the bill of materials and a sales engineer will come back with grades, availability and pricing against the standards above.